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Erwin Peiner Invited Talk
Erwin Peiner Invited Talk
at the 9th Forum on New Materials (CIMTEC 2022) on June 27th, 2022, Perugia, Italy
at the 9th Forum on New Materials (CIMTEC 2022) on June 27th, 2022, Perugia, Italy
The Invited Lecture "M. Fahrbach, J. Xu, E. Peiner, MEMS Cantilever Sensors”, has been given by Erwin Peiner on the 9th Forum on New Materials (CIMTEC 2022), Symp. FC, Session FC-1 "Physical MEMS/NEMS; MOEMS/NOEMS", June 27th, 2022, Perugia, Italy
Abstract
Cantilevers as the most basic micromechanical spring-mass system recently showed increasing potential for commercial applications beyond atomic force microscopy, e. g., for personal environmental monitoring (smoke, ultrafine particles (UFPs), humidity, ethanol, NO2, …), characterizing magnetic nanoparticles in liquids as well as high-throughput wafer-scale metrology with nanowire arrays using contact resonance spectroscopy and imaging.