A PEEK ON the lab
LAB and RESEARCH
The self-developed MEMS Picoindenter in department 5.1, PTB.
The Department 5.1 Surface Metrology, PTB
PTB is the National Metrology Institute of Germany with scientific and technical service tasks. The Department 5.1 Surface Metrology, led by Dr. Uwe Brand, concentrates mainly on
developing tactile silicon micro probes applicable for high- speed scanning
developing MEMS probes for measuring mechanical surface properties
modeling optical microscopes aiming at a better understanding of optical roughness metrology, and
developing procedures to produce crystalline silicon standards applicable in nanometrology.
Within the frame of this project, an innovative MEMS-Picoindenter with exchangeable AFM probes as indenters will be developed for high-throughput nanoelectromechanical characterisation of nanomaterials, and nanowires in particular.
Prototype of a silicon MEMS-Picoindenter head for nanomechanical and nanoelectricalcharacterisation of bulk and nanomaterials.
Prototype of a silicon MEMS-Picoindenter head
The MEMS-Picoindenter offers:
indentation force up to 1 mN with a nN resolution
indentation depth up to 10 µN with a pm resolution
dynamic indentation analysis up to 1 kHz
various AFM probes for material testing
I-V characterisation with fA resolution.
PEOPLE and LIFE
Within the frame of this project, and supported by experienced engineers and technicians in PTB department 5.1, the scientific coworker Dr. Christian Kuhlmann will
develop an innovative MEMS-SPM head
implement a high-speed surface scanning system with the maximum speed up to 1 mm/s
realize the through-tip current measurement system with a current sensitivity down to fA over the range up to mA
measure the nanomechanical and nanoelectrical properties of nanowires with a diameter down to sub-100 nm.