A PEEK ON the lab

(VSL, Netherlands)

Contacts: Richard KOOPS, rkoops@vsl.nl – Lauryna SIAUDINYTE, lsiaudinite@vsl.nl – Arthur VAN DE NES, avandenes@vsl.nl



As the Netherlands’ National Metrology Institute (NMI), VSL makes measurement results of companies, laboratories and institutions directly traceable to international standards (SI units).

By providing services such as calibrations, consultancy, reference materials, interlaboratory comparisons and training courses, VSL makes an important contribution to the dependability, quality and innovation of productsand processes in commerce and society.

By commission of the Dutch government, VSL manages and develops the National Measurement Standards.

VSL is a private company with a public task.

The Length-Optics Unit of VSL

As partner in the NanoWire project, the Length-Optics Unit of VSL contributes developing a non-contact optical analysis method of the nanowires based on scatterometry.

This method has the potential of enabling high through metrology of nanowire samples.

In contribution to that goal nanowires are also analyzed by AFM (Atomic Force Microscope).

Within this project VSL will focus on measuring the dimensional properties of the nanowires.

The scatterometry lab

The combination of advanced AFM (Atomic Force Microscope) metrology together with sophisticated optical metrology tools such as scatterometry provide unique possibilities to measure geometrical form and size of the complex 3D geometry of the nanowire arrays.

State of the art non-contact optical metrology facilities at VSL include broadband hyperspectral coherent Fourier scatterometer.


Walter Knulst – Research Scientist at Length-Optics Unit of VSL.

Recently joined VSL having background in laser physics and has worked before in industrydeveloping micromachining using ultrashort pulsed lasers for application in medical and semicon market.

Lauryna Siaudinyte - Research Scientist at Length-Optics Unit of VSL.

Working on:

●Coherent Fourier Scatterometry

●Characterization of the nanostructures

●Numerical simulations